The 2006 International Workshop on ″Dielectric Thin Films for Future ULSI Devices: Science and Technology″ (IWDTF–06) will be held at Kawasaki City Industrial Promotion Hall in Kanagawa prefecture, Japan on November 8–10, 2006. IWDTF started in 1999 (Tokyo) as a series of highly–successful annual domestic meeting on ultrathin silicon dioxide films. In succession of the second international workshop (IWDTF–04) held in Tokyo, 2004, IWDTF–06 will focus on science and technology of gate insulators for MOS devices such as ultrathin SiO2, oxynitrides and alternate gate dielectric materials with higher dielectric constants, including ferroelectric thin films. IWDTF–06 will further expand the scope to gate stack system around the dielectric thin films so as to include metal gate electrodes and mobility enhancement technologies in the channel layer. This workshop will provide an opportunity for scientists and engineers to exchange information and ideas at the forefront of research on gate dielectrics and gate stacks for ULSI applications. Selected topics of current interests will be reviewed by several invited talks. Contributions of both experimental and theoretical studies that provide a deeper understanding of the properties and quality of gate dielectrics and interfaces are very welcome. The workshop will consist of invited and contributed talks, and poster presentations. <b>Keywords:</b> Ultrathin silicon dioxide, oxynitride and oxide–nitride composite dielectrics<br>High–k gate dielectrics<br>Metal gate electrodes<br>Mobility enhancement technology<br>Ferroelectric and high–k films for memory applications<br>Growth and related process of gate dielectric films<br>Electrical characterization of gate dielectrics<br>Gate dielectric wearout and reliability<br>Characterization and control of gate dielectric/Si interface<br>Surface preparation and cleaning issues for gate dielectrics<br>Dielectric reliability related to process integration<br>Theoretical approaches to gate dielectrics/Si structure<br>
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IWDTF
City
Kanagawa
Country
Japan
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