Abbrevation
DMTDPI
City
San Jose
Country
United States
Deadline Paper
Start Date
End Date
Abstract

A cohesive design&#8211;to&#8211;silicon flow is indispensable in maintaining profitability of the semiconductor industry&#046; This conference invites articles that examine novel approaches for design&#8211;process integration aiming at fast turn&#8211;around, cost&#8211;effective, controllable, and high&#8211;yielding integrated circuit (IC) creation&#046; Contributions should emphasize fundamentals of technical solutions rather than their commercial embodiments&#046; Submissions in electronic design automation (EDA), design&#8211;for manufacturability (DfM), circuit and yield characterization, and other interdisciplinary studies are welcome&#046; Investigations with exclusive lithography focus including resolution enhancement techniques (RETs) such as optical and process correction (OPC) should be directed to the Optical Microlithography Conference in the same Symposium&#046; <b>Keywords:</b> propagation of design intent and communication of manufacturing constraints<br>physical design optimization for advanced or novel patterning<br>manufacturing&#8211;model&#8211;based physical design<br>RETs application with design knowledge<br>manufacture&#8211;friendly designs and practices, especially practical<br>descriptions of production designs<br>cost&#8211;performance tradeoffs between design and manufacture<br>performance&#8211;power&#8211;manufacturability (speed&#8211;leakage&#8211;RETs) optimization<br>layout optimization for systematic and random yield loss reduction<br>novel statistical design flow<br>design and flow methodologies for productivity improvement<br>optimal insertion of RETs into design&#8211;manufacturing flow<br>design&#8211;to&#8211;process simulation and calibration<br>physical design verification methodologies&#046;<br>