20th International Conference on Micro Electro Mechanical Systems, Kobe, Japan

Abbrevation

MEMS

Link

http://www.conferences.jp/mems2007/

City

Kobe

Country

Japan

Deadline Paper

2006-11-13

Start Date

2007-01-21

End Date

2007-01-25

Abstract

Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area. In recent years it has attracted over 600 participants and has presented more than 200 select papers in non–overlapping oral and poster sessions. Keywords: Design, simulation and analysis tools with experimental verification Fabrication technologies and processes Silicon and non–silicon materials Electro–mechanical integration techniques Assembly and packaging approaches Metrology and operational evaluation techniques System architecture