<P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>at the spring meeting 2007 we set up preparations for the 8th Yield Enhancement User Group meeting. The scope of the User Group is supporting twice a year a platform open for European fab sites for discussion and information exchange of managers, engineers and scientists dealing with Yield Enhancement for semiconductor manufacturing. The workshop language is English and each company attending is supposed to present.<?xml:namespace prefix = o ns = ″urn:schemas–microsoft–com:office:office″ /></SPAN></P> <B>Keywords:</B> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>1. Advanced defect to yield correlation</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>2. Defect type specific improvements (one selected defect type/process)</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>3. Design for manufacturing:</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>4. In–line macro inspection tools, application, experiences</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>5. What are the best known methods for failure analysis?</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>6. How to use APC, FDC for yield and defect analysis?</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>7. Yield models</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>8. Process change management</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>9. How can we assure save new product ramp?</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>10. How to assure fast yield ramp with very small base load?</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>11. What are the methods for burn in strategies and wafer level reliability? Defect to</SPAN> <SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>burn in data: correlation, understanding</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>12. Test structure (yield analysis)</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>13. New test programs:</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>14. Equipment monitoring</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>15. What are the costumer requirements for scrap, information…?</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>16. Yield improvement for mixed (digital and analog) signal products</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>17. Defect reporting</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>18. Reliability in the field and correlation to the defect density</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>19. Knowledge database for defect issues, tool problems</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>20. Defect density comparison and reporting</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>21. Electrical data :</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>22. Discussion on commercially available software</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>23. Inspection tools, prober, tester experience exchange (defect density)</SPAN></P> <P class=MsoNormal style=″MARGIN: 0cm 0cm 0pt; TEXT–ALIGN: left; mso–layout–grid–align: none″ align=left><SPAN lang=EN–US style=″FONT–SIZE: 12pt; FONT–FAMILY: Arial; mso–font–kerning: 0pt″>24. Management of production equipment data</SPAN></P>
Abbrevation
GMM Workshop
City
Landshut
Country
Germany
Start Date
End Date
Abstract