7th ECS-International Semiconductor Technology Conference, Shanghai, China

<P>The 7th International Semiconductor Technology Conference–ISTC2008, sponsored by The Electrochemical Society, Japan society of Applied physics and IEEE, organized with the intention of providing a forum for the presenting and discussion of the latest developments in silicon semiconductor technology and related fields&#046; Papers that deal with all aspects of fabrication processes, equipment, materials, device physics, characterization, and applications are solicited&#046; </P> <P><B>Keywords:</B></P> <P><B>A&#046; Device and Reliability B&#046;Design for Manufacturing (DFM) C&#046; Photolithgraphy D&#046; FEOL &amp; BEOL Advanced Processing E&#046; CMP and Post&#8211;CMP Cleaning F&#046; Packaging, Assembly and Test G&#046; Emerging Technology</B></P>