Photomask Japan 2008 is the 15th international symposium on photomasks and NGL masks in Japan. The aim of the symposium is to bring together engineers and investigators from Japan, USA, and all over the world in the field of photomasks, NGL masks, and related technologies to discuss recent progress, applications, and future trends. The conference program will feature invited papers, contributed papers, poster sessions, and a rump session with panel discussion. Display opportunities will be provided to mask manufacturing materials, and equipment companies.<BR><B>Keywords:</B> <LI>Materials of and for Photomasks <LI>Fabrication Process Steps and Equipments for Photomasks<BR>(process and equipments for developing, etching, cleaning etc.) <LI>Photomask Writing Tools and Technologies <LI>Metrology Tools and Technologies <LI>Inspection Tools and Technologies <LI>Repairing Tools and Technologies <LI>Mask Data Preparations <LI>EDA and DFM for Photomask <LI>Photomasks with RET: PSM, Masks with OPC <LI>Photomask relating Lithography Technologies <LI>NGL Masks: EUV, E–Beam, Imprint etc. <LI>Mask Cost and Mask Development Strategies </LI>
Abbrevation
PMJ
City
Yokohama
Country
Japan
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