12th European Advanced Process Control and Manufacturing Conference, Grenoble, Frankreich

Abbrevation

APCM

Link

http://www.apcm-europe.eu

City

Grenoble

Country

France

Deadline Paper

2011-11-18

Start Date

2012-04-16

End Date

2012-04-18

Abstract

The European Advanced Process Control and Manufacturing (APCM) Conference arose from the European AEC/APC Conference. It is focussed on Current challenges and future needs of Advanced Process Control and Manufacturing Effectiveness. It is directed to manufacturers, suppliers and scientific community of semiconductor, photovoltaic, LED, flat panel, MEMS, and other relevant industries. The topics are focussed on current challenges and future needs of Advanced Process Control and Manufacturing Effectiveness. The conference takes place at centers of the semiconductor and photovoltaic industry in Europe annually. It is coordinated with the Sematech AEC/APC Symposium in America and Asia and Semicon Europe. The conference is organised by Silicon Saxony, a member of European Semiconductor Networks, and hosted locally. The conference is self–financed by fees and sponsoring. Advanced Process Control on Unit Process Level <ul><li>APC applications at Unit Processes Plasma processes (PVD, PECVD, plasma etch, P3I), Thermal processes (CVD, e–beam, i–beam, evaporation, doping, epitaxy, diffusion, RTP), Wet processes (clean, etch, electro– and electroless plating), Metrology (films, defect density, in line and large area metrology), Lithography (track, exposure tool), Implant, CMP, Backend </li><li>Unit process control methods Fault detection and classification (FDC) and fault prediction (FP), Run–to–Run Control (R2R), large area uniformity, unit process development and transfer </li><li>Tool and sensor data analysis Sensor implementation and integration, data collection, aggregation, classification and quality, assigning of logistical data, statistical approaches and non–statistical measures </li><li>Maintenance & tool optimization Preventive maintenance, condition–based maintenance, predictive maintenance, tool improvements, spare parts assessment and qualification, conditioning and first wafer effects, chamber matching </li><li>Enhanced Equipment Quality Assurance (EEQA) Physical and chemical unit process models and model–based sensors, methods to ensure component functionality, reliability, performance and traceability, Equipment Health Monitoring (EHM) </li></ul> Advanced Process Control on Fab Level <ul><li>Fab level process control methods Run–to–Run and Wafer–to–Wafer control, realtime control, control algorithms, defect inspection, test structures (wafer), sampling strategy </li><li>Virtual metrology Application of process models, control density improvement, reduction of measurement operations and non–product wafers, throughput increase </li><li>Yield management Prediction and improvement of product parameters and yield by use of APC methods, novel methods of yield modeling and management </li><li>Factory data analysis Real–time data collection aggregation, classification and quality, process and equipment capability, mathematical methods and model creation, novel methods of data visualization and data analysis </li><li>IT infrastructure Tool interfaces and communication, sensor / actuator bus, interfaces, demands on new standards </li></ul> Manufacturing Effectiveness and Productivity <ul><li>Unit process & equipment productivity Throughput and uptime improvement, cycle time and variability reduction, non–productive wafer and substrate reduction, tool and unit process related productivity improvement </li><li>Factory productivity and automation Factory scheduling and dispatching optimization, throughput and uptime improvement, cycle time and variability reduction, automation–related productivity improvement, master data management, Material tracking of materials, spare parts and consumables, production control </li><li>Factory modeling, simulation and optimization Design for manufacturing, future factory design, capacity and cost modeling, yield modeling & improvement, novel methods of manufacturing data analysis and visualization </li><li>Cost optimisation and end–of–life equipment issues Fixed and variable cost reduction, Cost of Ownership (CoO) and Overall Equipment Efficiency (OEE), unit cost modelling, equipment and maintenance optimization </li><li>Environment and Green Manufacturing Global ESH strategies, facilities operations, facility systems reliability improvements, manufacturing sustainability and resource conservation, lean manufacturing </li></ul>