Abbrevation
ICPT
City
Grenoble
Country
France
Deadline Paper
Start Date
End Date
Abstract
The conference will be held in English and covers any aspects of planarization and CMP technology. We are encouraging authors to submit papers, which comprise the following topics or areas of interest:<br>ILD/STI CMP<br>Cu/low–k CMP<br>CMP equipment and metrology<br>CMP process integration and control<br>Post CMP cleaning and defects<br>CMP consumables<br>CMP consumables metrology<br>CMP fundamentals (and defects)<br>Emerging technologies in CMP<br>3D ICs/TSV applications<br>Green CMP<br>New CMP applications (data storage, LED, glass, PCB, display)<br>