The conference program is organized with presentations/talks and poster sessions in parallel. Additionally, several half–day technical tutorials will be offered to you. The conference will be an excellent opportunity to promote your company′s products. Usergroup Meetings are an easy way to meet your customers. The schedule of events will provide plenty of time to get in contact with your colleagues, customers and suppliers.<br>The European apc|m Conference will be built around sessions of following topics:<br>Process Level APC<br>Plasma etch and CVD<br>Sputtering, P3I, and e––beam<br>Lithography<br>Thermal, wet processing & CMP<br>Backend<br>Metrology and R2R<br>APC for legacy tools<br>Fab Level APC<br>Fab level process control methods<br>Virtual metrology<br>Yield management<br>Factory data analysis<br>IT infrastructure<br>Manufacturing Effectiveness and Productivity<br>Unit process & equipment productivity<br>Factory productivity and automation<br>Factory modeling, simulation and optimization<br>Cost optimization and end–of–life equipment issues<br>Environment and Green Manufacturing<br>
Abbrevation
apcm
City
Munich
Country
Germany
Deadline Paper
Start Date
End Date
Abstract