Abbrevation
IITC/MAM
City
Grenoble
Country
France
Deadline Paper
Start Date
End Date
Abstract
Topics of Interest<br>Process integration<br>Materials and unit Processes (Metal, dielectric, barrier, Wet, CMP, PVD, CVD, ALD, ECD, SAM, Reflow…)<br>Reliability and Failure analysis<br>Advanced characterization and modelling techniques<br>Nano–materials<br>