Abbrevation
apc|m
City
Dublin
Country
Ireland
Deadline Paper
Start Date
End Date
Abstract

CONFERENCE PROGRAM<br>The conference program is organized with presentations/talks and poster sessions in parallel&#046; Additionally, several half&#8211;day technical tutorials will be offered to you&#046; The conference will be an excellent opportunity to promote your company&#8242;s products&#046; Usergroup Meetings are an easy way to meet your customers&#046; The schedule of events will provide plenty of time to get in contact with your colleagues, customers and suppliers&#046;<br>The European apc|m Conference will be built<br>around sessions of following topics:<br>Process Level APC<br>Plasma etch, CVD and ALD<br>Sputtering, P3I, and e&#8211;&#8211;beam<br>Lithography<br>Thermal, wet processing &amp; CMP<br>Backend<br>Metrology and R2R<br>APC for legacy tools<br>Fab Level APC<br>Fab level process control methods<br>Virtual metrology<br>Yield management<br>Factory data analysis<br>IT infrastructure<br>Manufacturing Effectiveness and Productivity<br>Unit process &amp; equipment productivity<br>Factory productivity and automation<br>Factory modeling, simulation and optimization<br>Cost optimization and end&#8211;of&#8211;life equipment issues<br>Environment and Green Manufacturing<br>