36th European Mask and Lithography Conference, EMLC 2020
KU Leuven, Belgium, on June 22 - June 24, 2020
The focus of this 2½ day conference is state-of-the-art of mask technology and lithography, such as mask manufacturing, mask business, lithography and mask applications, emerging mask & lithography technologies, and mask & lithography equipment.
This conference has annually brought together scientists, researchers, engineers and developers from around the world to present papers at the forefront of research, manufacturing and application. It provides a place where both specialists from industry and advanced research as well as equipment and software providers become acquainted with new developments and results.
The conference will be opened on Monday, June 22nd, 2020 with a Tutorial at 02:00 PM following a Get Together and a Poster Session at 07:00 PM. On Tuesday, June 23rd, 2020 the conference will be continued at 09:00 AM and the scheduled end of the conference will be at 06:30 PM on Wednesday, June 24th, 2020.
The conference dinner will be held at the Faculty Club located in the magnificent Great Beguinage of Leuven, a UNESCO World Heritage, on Tuesday evening.